AMAT 0100‑71309 AKT MF Primary Distribution PCB Assembly

Technical Specifications

Model：0100‑71309

Brand：AMAT Applied Materials

Product Type：AKT MF Primary Distribution PCB assembly

Applicable System：AMAT AKT series large‑substrate PECVD semiconductor equipment

Supply Voltage：+24VDC, +15VDC, ‑15VDC auxiliary DC power input

Interface：Multi‑pin dedicated power connectors, digital I/O signal terminals, internal daughter‑board slot connectors

Common Revision：REV01,multiple hardware revisions available

Status Indicator：On‑board LED for each power rail status and fault diagnostic status

Built‑in Function：Multi‑rail power distribution,over‑current fuse protection,chamber digital signal routing,power anomaly detection,fault status feedback to AKT host controller

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：Chassis internal fixed installation

Weight：1.28kg

Product Brief:

0100‑71309 is legacy MF primary distribution PCB assembly manufactured by AMAT Applied Materials. It serves as main power and signal distribution board for AKT large‑substrate PECVD process chamber. It distributes multi‑rail DC power supply with built‑in fuse over‑current protection, routes digital control signals between host and chamber local hardware. On‑board LED provides visual diagnosis for power rail and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.