AMAT 0100‑38032 ESC Controller PCB Assembly

Technical Specifications

Model：0100‑38032，Rev P1

Brand：AMAT Applied Materials

Product Type：ESC controller PCB assembly

Applicable System：AMAT Centura,Endura,Precision 5000 200mm semiconductor process equipment

Supply Voltage：System DC rail input

Interface：VME bus connector,high‑voltage signal interface for ESC chuck

Common Revision：Rev P1,multiple hardware revisions available

Status Indicator：On‑board LED for board operating and fault alarm status

Built‑in Function：Electrostatic chuck high‑voltage switching,chuck voltage precise regulation,wafer holding force feedback monitoring,process thermal uniformity control,fault signal output to host system

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：VME card cage plug‑in installation

Weight：0.65kg

Product Brief:

0100‑38032 is legacy ESC controller PCB assembly manufactured by AMAT Applied Materials. It is VME slot‑mount control board for electrostatic chuck,used to generate and adjust high‑voltage bias to hold silicon wafer during etching,deposition and other vacuum processes. It monitors chuck feedback signal to maintain stable clamping force and wafer thermal uniformity. On‑board LED provides visual running and fault diagnosis. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy 200mm wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.